Automated multi-grid handling apparatus

ABSTRACT

An automated grid handling apparatus for an electron microscope including a transport module having a multistage shuttle, the multistage shuttle having a first shuttle stage having a single degree of freedom of motion for gross movement, a second shuttle stage having a single degree of freedom of motion independent of the first stage for fine movement, an end effector connected to at least one of the first and second shuttle stages, the end effector being configured to hold a grid carrier and transport the grid carrier holding the grid into and out of an electron microscope through a transport interface that is communicably connected to a multi-axis positioning stage port of the electron microscope, the end effector having a range of motion, defined by a combination of the first and second stage degrees of freedom of motions and the multi-axis positioning stage internal to the electron microscope, and an automated loading module connected to the frame and being communicably connected to the transport module, the automated loading module including a load port module through which grids are loaded into the automated loading and transport modules.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a continuation of U.S. application Ser. No.17/374,008, filed Jul. 13, 2021, now U.S. Pat. No. 11,450,507, which isa continuation of U.S. application Ser. No. 16/611,935, filed on Nov. 8,2019, now U.S. Pat. No. 11,075,055, which is a National Stage ofInternational Application No. PCT/US2018/032287, having an InternationalFiling Date of 11 May 2018, which claims priority to and benefit of U.S.Provisional Patent Application No. 62/504,835, filed May 11, 2017, thedisclosures of which are incorporated herein by reference in theirentireties.

BACKGROUND 1. Field

The exemplary embodiments generally relate to automated grid handlingsystems and, more particularly, to automatic grid handling systems forautomated inspection or imaging systems.

2. Brief Description of Related Developments

Generally grids are loaded into an electron microscope, such as atransmission electron microscope (TEM), for inspection or imaging one ata time. The process to load a single grid is tedious and very timeconsuming. An operator prepares a specimen on a grid and carefullyplaces the grid into a grid holder device. The operator then preparesthe TEM to accept the grid holder device by venting the TEM's multi-axispositioning port. Next the operator inserts the grid holder device intothe TEM's multi-axis positioning port and starts a pumping process. Thepumping process will continue until the TEM's multi-axis positioningport reaches a vacuum level substantially similar the vacuum level inthe TEM column. Once the vacuum level is achieved, the operatorpositions the grid holder to an operating position. The operator maythen perform manual imaging tasks or run an automated task on a singlegrid. When the imaging tasks are complete, the operator vents the TEM'smulti-axis positioning port and removes the grid holder. The final stepis to remove the grid from the grid holder and load a new grid ifdesired.

There have been recent attempts to automate the handling of grids for aTEM. One such attempt provided a grid loader and position system thatattached to a TEM's auxiliary port. Imaging was accomplished bypositioning an end effector, directly clamping a grid, through theauxiliary port and into the path of the electron beam. All positioningwas controlled by the grid loader and positioning system and the entirecontrol system was external to the TEM. Only the end effector, directlyclamping the grid, entered the TEM column 275 through the auxiliaryport. The grid loader and positioning system is a standalone system thatrequires its own facilities such as pneumatics, electrical and vacuumsources. This approach is overly complex, costly and does not takeadvantage of facilities and systems internal to the TEM.

It would be advantageous to have an automatic grid handling system thathandles a batch of grids and takes advantage of the facilities andsystems internal to the electron microscope.

BRIEF DESCRIPTION OF THE DRAWINGS

The foregoing aspects and other features of the disclosed embodiment areexplained in the following description, taken in connection with theaccompanying drawings, wherein:

FIG. 1A is a schematic illustration of an automatic grid handling systemin accordance with aspects of the disclosed embodiment, retracted;

FIG. 1B is a schematic illustration of an automatic grid handling systemin accordance with aspects of the disclosed embodiment, pick position;

FIG. 1C is a schematic illustration of an automatic grid handling systemin accordance with aspects of the disclosed embodiment, inspectionposition;

FIG. 1D is a perspective view of an automatic grid handling system inaccordance with aspects of the disclosed embodiment, inspectionposition;

FIG. 1E is a perspective view of an automatic grid handling system inaccordance with aspects of the disclosed embodiment, inspectionposition;

FIG. 2A is a perspective view of a grid carrier magazine in accordancewith aspects of the disclosed embodiment;

FIG. 2B is a perspective view of a grid carrier magazine supporting agrid carrier on a shelf in accordance with aspects of the disclosedembodiment;

FIGS. 2C-D are schematic illustrations of a grid carrier in accordancewith aspects of the disclosed embodiment, in a locked and unlockedposition;

FIGS. 2E-F are perspective views of a grid carrier in accordance withaspects of the disclosed embodiment, holding a grid in a lockedposition;

FIGS. 2G-H are perspective views of a grid carrier in accordance withaspects of the disclosed embodiment, holding a grid in a locked positionand empty in a unlocked position;

FIGS. 3A-3B are schematic illustrations of a grid in accordance withaspects of the disclosed embodiment;

FIG. 4A is a schematic illustration of a gripper end effector inaccordance with aspects of the disclosed embodiment;

FIGS. 4B-C are perspective views of a gripper end effector in accordancewith aspects of the disclosed embodiment, clamp (close) and unclamp(open) a grid carrier;

FIGS. 4D-E are perspective views of a gripper end effector in accordancewith aspects of the disclosed embodiment, clamp (close) and unclamp(open) a grid carrier;

FIG. 5 is a flow diagram in accordance with aspects of the disclosedembodiment.

DETAILED DESCRIPTION

FIGS. 1A-1E are schematic illustrations and perspective views of anautomatic grid handling system 100 in accordance with aspects of thedisclosed embodiment. Although the aspects of the disclosed embodimentwill be described with reference to the drawings, it should beunderstood that the aspects of the disclosed embodiment can be embodiedin many forms. In addition, any suitable size, shape or type of elementsor materials could be used. It is also noted that while X, Y and Z axisare referred to, reference to these axes is exemplary only and in otheraspects the axes may have any suitable directional identifiers.

It should also be understood that while the aspects of the disclosedembodiments are described herein with respect to a transmission electronmicroscope (TEM), the aspects of the disclosed embodiment can be appliedto any suitable grid (containing a specimen) inspection or imagingequipment where a grid is supported on a grid carrier during inspectionor imaging of the grid (containing a specimen). For example, aspects ofthe disclosed embodiment may be employed in any suitable equipment wherea grid is held in grid carrier by the end effector of the disclosedembodiment during inspection or imaging. In alternative embodiments, theend effector of the grid handling system may hold the grid directlyduring inspection or imaging.

In one aspect, in the context of the TEM, the automatic grid handlingsystem 100 may provide loading and storage of about 25 grids (containinga specimen) in a single exchange (e.g. loading of a batch of gridscontaining specimens) while in other aspects related to the TEM or othersuitable inspection equipment (such as those mentioned above) more orless grids (containing a specimen) may be loaded and stored. Theautomatic grid handling system 100 may be connected to a conventionalmulti-axis positioning stage 150 used in, for example, TEMs thatprovides substantially all necessary degrees of freedom of motion toposition a grid within the TEM during inspection. A suitable example ofa multi-axis positioning stage 150 of a TEM is the CompuStage™manufactured by FEI. Alternatively, other suitable multi-axispositioning stages 150 are manufactured by JEOl and HitachiHigh-Technologies. In other aspects the automatic grid handling system100 may connect to any suitable loading system of, for example, anysuitable imaging or inspection equipment. The automatic grid handlingsystem 100 in combination with a conventional multi-axis positioningstage may provide, high-resolution, high-speed and high-stabilityposition control of the grid during imaging or inspection. As will bedescribed below, in accordance with the aspects of the disclosedembodiment, the grid handling and storage operations as well as thepositioning of the grid (containing a specimen) in the TEM column 275may be effected with, for example, the combination of the conventionalmulti-axis TEM positioning stage 150 and the automatic grid handlingsystem 100.

As will also be described below, the automatic grid handling system 100may include a transport module 125 that has an end effector 101configured to substantially directly handle any suitable grid carrier200, where the grid carrier 200 may support several different grid types300/301, such as several different specimen grids 300/301. A gripper 400as part of the end effector 101 may be operated through coordinatedmovement of two or more axis of motion, which when combined act to openand close the gripper 400, gripping the grid carrier 200. In otheraspects the gripper 400 of the end effector may be operated in anysuitable manner such as with a dedicated drive that drives the gripperto an open and closed position. In yet another aspect, the gripper 400of the end effector 101 may be operated with a spring loaded flexure anda dedicated drive where the drive may drive the gripper to an openposition and the spring may drive the gripper to a closed position. Theend effector 101 may be configured to manipulate the grid carrier 200that is holding the grid in a high vacuum environment or any othersuitable environment such as a non-vacuum or low vacuum environment. Theend effector 101 may be configured to grip individual grid carriers 200during extraction from any suitable grid carrier magazine 102/230 havinggrid carrier shelves 231. The end effector 101 (and the grid positioningunit 104 which the end effector is a part of) may be configured toprovide a precise and rigid interface to support the grid carrierholding a grid (containing a specimen) which enables fast position moves(e.g. about 8 to about 24 microns or any other suitable distance) andrapid settling (e.g. to about less than 5 nanometers) in less than about100 ms substantially without introducing undesired vibrational modes inthe grid during inspection or imaging. In other aspects the end effector101 (and the grid positioning unit 104 which the end effector is a partof) may be configured to perform fast position moves (e.g. about 8 toabout 24 microns or any other suitable distance) and rapid settling(e.g. to about less than 4 nanometers) in less than about 25 ms to about35 ms substantially without introducing undesired vibrational modes inthe grid during inspection or imaging. In other aspects the end effector101 (and the grid positioning unit 104 which the end effector is a partof) may be configured to perform gross position moves and may drive theend effector to a hard stop 105 substantially without introducingundesired vibrational modes in the grid during inspection or imaging.

In one aspect the grids 300/301 may be held in the grid carrier 200. Thegrid carrier may support several different grid types 300/301 where theseveral different grid types may support several different specimentypes (e.g., specimens resulting from life sciences, material sciences,semiconductor and any other suitable operations). The grid carrier mayhave pocket 210 that supports and constrains the several different gridtypes 300/301. In one aspect, there may be a different pocket 210 foreach of the several different grid types 300/301 or in other aspects,there may be a single pocket 210 that supports and constrains more thanone of the several different grid types 300/301. The grid carrier 200may have a top section 201 and a bottom section 202 where the topsection closes onto the bottom section. The top section and the bottomsection may be connected by hinge 205. Hinge 205 may connect the topsection to the bottom section and enable the top section to close ontothe bottom section. In other aspects, any suitable connection mechanismmay be used to connect the top section 201 and the bottom section 202.The grid carrier has a locking device 206 the locks the top section tothe bottom section while the grid carrier is closed. The locking device206 may be unlocked enabling the grid carrier to be opened. One of theseveral different grid types 300/301 may be loaded into the grid carrierwhen open and the grid may be constrained and supported while the gridcarrier is closed and locked. The top section 201 and the bottom section202 are configured such that the specimen on the grid may be exposed tothe TEM beam 250 during imaging or inspection. The grid carrier may havegripping areas 204L and 204R where the gripper 400 as part of the endeffector 101 may grip or constrain the grid carrier for transport of thegrid carrier. The gripping areas 204L and 204R may be located at anysuitable location on the grid carrier 200. In another aspect, the gridcarrier 200 may have a single gripping area 204 and in still otheraspects the grid carrier may have any number of suitable gripping areasthat may be located at any suitable location on the grid carrier 200.The grid carrier 200 may have an alignment feature 203 that may alignwith the alignment feature 232 of the grid carrier shelf 231 of the gridcarrier magazine 102/230. The alignment feature 203 may be located atany location on the grid carrier 200 and the alignment feature 232 maybe located at any suitable location on the grid carrier shelf 231 of thegrid carrier magazine 102/230. The grid may be loaded into the gridcarrier in a certain orientation, aligning alignment feature 203 withalignment feature 232, required during imaging or inspection. In otheraspects, the grid carrier 200 may have a bottom section 202, a pocket210 that supports and constrains the several different grid types300/301 and hold down fingers 212 that constrain the grid into thepocket 210.

In one aspect the grid carriers may be held in the grid carrier magazine102/230 and are configured for insertion into the automatic gridhandling system 100 as will be described below. The grid carriermagazine 102/230 and the grid carriers 200 therein may be configured toprovide for the automatic or manual loading, inspection and removal ofthe grids supported in the grid carrier magazine 102/230. For example,the grid carrier magazine 102/230 may include kinematic features 233that enable substantially direct handling of the grid carrier magazine102/230 by a magazine handling system internal to the automatic gridhandling system 100 and external to the automatic grid handling system100. Kinematic feature 233 may be located at any suitable location onthe grid carrier magazine 102/230. In one aspect the grid carriermagazine 102/230 supporting the grid carriers 200 may be configured foruse in vacuum environments while in other aspects the grid carriermagazine 102/230 supporting the grid carriers 200 may be configured foruse in non-vacuum environments. In another aspect the grid carriermagazine 102/230 may be loaded and unloaded of grid carriers external tothe grid handling system 100 by a human or any other suitable loadingequipment.

Still referring to FIGS. 1A-1E the automatic grid handling system 100includes a frame 140F, transport module 125 connected to the frame 140F,loading module 140 connected to the frame 140F, a grid carrier magazineload lock 120, a pneumatics module 130 (which may be connected to theframe) and communicably coupled to the loading module 140 and thetransport module 125, a vacuum module 172 (which may be connected to theframe) and communicably coupled to the loading module 140 and thetransport module 125 and any other suitable computer control systemhaving suitable processors and memories and any other facilities such apower distribution system. The pneumatics module 130 may include an airsource 130S and any suitable valves for operating, e.g., valves andclosures of the loading module 140 and/or vacuum module 172 describedherein. The vacuum module 172 may include any suitable vacuum pumps forpumping and maintaining the internal chambers of the loading module 140and the transport module 125 at any suitable vacuum pressure forinterfacing with, for example, the TEM. The vacuum module 172 may alsoinclude any suitable valves for selectively isolating, e.g., the vacuumpumps from each other and/or from the chambers of the loading module140. In one aspect, the vacuum module 172 may include any suitablevacuum pumps for pumping and maintaining the grid carrier magazine loadlock 120 at any suitable vacuum pressure for interfacing with, forexample, the TEM. In one aspect, the vacuum pressure of the internalchambers of loading module 140 and transport module 125 may bemaintained and control by the vacuum pumps included with the TEM whilethe vacuum pressure of the carrier magazine load lock 120 may bemaintained and controlled by the vacuum module 172.

In one aspect the frame 140F may form or be integral (e.g. of one pieceunitary construction) to at least part of the loading module 140. Inother aspects the loading module 140 may be connected to the frame 140Fin any suitable manner. In one aspect the loading module 140 may includea sealable grid carrier magazine load lock chamber 120. The grid carriermagazine load lock chamber 120 may be selectively communicably connectedto the transport module 125 through a closable opening or port 120P. Theloading module 140 may include any suitable isolation device configuredto selectively seal the port 120P for sealing or otherwise isolating anatmosphere of the grid carrier magazine load lock chamber 120 from anatmosphere of the transport module 125 and the TEM column 275. The gridcarrier magazine load lock chamber 120 may include any suitable door120D configured to seal a load/unload opening of the grid carriermagazine load lock chamber 120. In one aspect the door may be hinged tothe grid carrier magazine load lock chamber 120 while in other aspectsthe door 120D may be removable from the grid carrier magazine load lockchamber 120 for allowing access to the grid carrier magazine load lockchamber 120. In one aspect the door 120D may have a manual closure, andin other aspects the door 120D may have an automated closure. Theloading opening may be configured to allow ingress and egress of a gridcarrier magazine 102/230 to and from the grid carrier magazine load lockchamber 120. In one aspect, as will be described further below, thegrids may be TEM grids held by grid carriers 200 which in turn are heldin a grid carrier magazine 102/230. In one aspect the grid carriermagazines 102/230 and the grid carrier magazine load lock chamber 120may be configured for manual operator insertion and removal of the gridcarrier magazine 102/230 to and from the grid carrier magazine load lockchamber 120 while in other aspects the grid carrier magazines 102/230and the grid carrier magazine load lock chamber 120 may be configuredfor automated insertion and removal of the grid carrier magazine 102/230to and from the grid carrier magazine load lock chamber 120. In oneaspect the grid carrier magazine load lock chamber 120 may have apressure indicator to alert when the door 120D may be opened. In anotheraspect the door may have a locking mechanism to lock and unlock the door120D based on the pressure indicator. The door 120D may be locked whenthere is a pressure differential between the grid carrier magazine loadlock chamber 120 pressures and the outside atmosphere. The door 120D maybe unlocked when the grid carrier magazine load lock chamber 120pressure is substantially the same as the outside atmosphere.

The transport module 125 may include a transport module interface 125Iconfigured to couple and uncouple the grid handling system 100 to andfrom a corresponding interface, such as interface or port 180P, of theTEM so that the grid handling system 100 can be installed to or removedfrom the TEM as a unit. The transport module interface 125I communicablyconnects the transport module 125 and the loading module 140 with aninterior of the TEM through the port 180P. The transport moduleinterface 125I may connect the grid handling system 100 to theconventional multi-axis positioning stage 150 used in, for example, TEMsthat position grid carriers 200 or grids 300/301 within the TEM duringinspection. In one aspect, the grid handling system 100 may load a gridcarrier 200 holding a grid and position the grid carrier in the Xdirection using high-resolution, high-speed and high-stability positioncontrol and the conventional multi-axis positioning stage 150 mayposition the grid carrier 200 in the Y, Z and theta directions usingconventional means during imaging or inspection. In another aspect, agrid handling system 100 may load a grid carrier and the conventionalmulti-axis positioning stage 150 may position the grid carrier in the X,Y, Z and theta directions using conventional means during imaging orinspection. In one aspect the grid handling system 100 driven by theconventional multi-axis positioning stage 150 may move in the X, Y, Zand theta directions. In other aspects, the grid handling system 100driven by the conventional multi-axis positioning stage 150 may move inthe Y and Z directions only. Referring now to FIG. 1D, the grid handlingsystem 100 may include transport module interface bearing 125B1,transport module interface seal 125S, transport module rear bearing125B2 and grid handling system fastener 125F. In one aspect, theconventional multi-axis positioning stage 150 may move the grid carrier200 in the direction of arrow 702 (theta or roll). The frame 140F may befastened directly to the TEM using one or more grid handling systemfasteners 125F prohibiting the frame from moving in the direction ofarrow 702 (theta or roll). In one aspect, the one or more grid handlingsystem fasteners 125F may allow the frame 140F to move in the X, Y and Zaxes. The transport module 125 may include transport module interfacebearing 125B1, transport module interface seal 125S and transport modulerear bearing 125B2 allowing transport module 125, including transportinterface 125I, end effector 101 and multistage 104 to move in thedirection of arrow 702 (theta or roll). Referring again to FIG. 1D, thetransport module 125 and the magazine shuttle chamber 126 may be atsubstantially the same pressure as the TEM column 275 and may bemaintained and control by the vacuum pumps included with the TEM. In oneaspect, the conventional multi-axis positioning stage 150 may move inthe direction of arrow 702 (theta or roll) by +/−75 degrees. In oneaspect, the grid handling system 100 may move in the direction of arrow702 (theta or roll)+/−75 degrees, while in other aspects the frame 140Fand the loading module 140 will remain fixed while portions of thetransport module may move the direction of arrow 702 (theta orroll)+/−75 degrees. In one aspect, the seal may be a Ferrofluidic seal,in other aspects the seal may be any suitable seal configured tomaintain a seal (isolation barrier between the transfer module andatmosphere) while portions of the transport module move in the directionof arrow 702 (theta or roll).

The loading module 140 may include a grid carrier magazine shuttlechamber 126 communicably connected to the transport module 125. The gridcarrier magazine shuttle chamber 126 may include a grid carrier magazineshuttle 126S that may be driven along any suitable axis by a gridcarrier magazine shuttle positioner 126P. The grid carrier magazineshuttle positioner 126P may include any suitable drives or motors 126Dand/or guides for allowing movement of a grid carrier magazine shuttlealong at least the Z axis. In one aspect the motor 126D may be anysuitable motor having any suitable position resolution such asultrasonic piezo motor, stepper motors, brushless motors, brushedmotors, etc. The grid carrier magazine shuttle 126S may be a linearstage configured to move (via the grid shuttle positioner 126P) into aposition (e.g. through the port 120P) for picking/removing andplacing/inserting a grid carrier magazine 102/230 from and to the gridcarrier magazine load lock 120. In one aspect, the grid carrier magazine102/230 includes kinematic features 233 that enables manual andautomated loading of the grid carrier magazine 102/230 into the gridcarrier magazine shuttle load lock 120 through door 120D. The gridcarrier magazine shuttle 126S may also be configured to move the gridcarrier magazine 102/230, to a predetermined pick/place position 126PPor to a grid carrier magazine retract position 126R along at least the Zaxis. With the grid carrier magazine 102/230 at the pick/place position126PP, the end effector 101 of the grid positioning unit 104 may beallowed to remove and/or insert a grid carrier from and/or to the gridcarrier magazine 102/230. The grid shuttle 126S may also be configuredto move the grid carrier magazine 102/230 to a predetermined retractposition (as will be described below) to allow the grid positioning unit104 to move along the X axis for transporting the grid carrier to theTEM. In one aspect the positioning unit 104 moves the grid carrierthrough the transport module interface 125I and into the TEM column 275for inspection or imaging.

Still referring to FIGS. 1A-1E, the transport module 125 may include thegrid carrier positioning unit (multistage shuttle) 104 which may beconfigured to pick/place grid carriers from/to the grid carrier magazine102/230, transport the grid carrier (holding the grid and specimen)through the transport module interface 125I to the TEM column 275 andsupport the grid carriers during inspection or imaging within the TEMcolumn 275. The grid positioning unit 104 (multistage shuttle) mayinclude a first shuttle stage 104S1 (gross positioning stage) havingsingle degree of freedom of movement and configured to move the endeffector 101 along the X axis. The grid positioning unit 104 may alsoinclude a second shuttle stage 104S2 (fine positioning stage) that iscarried by the first stage but is separate and distinct from the firststage in its operation. The second shuttle stage 104S2 having a singledegree of freedom of movement, independent of the first shuttle stage104S1, and configured to move the end effector 101 along the X axis. Thecombined movements of the first and second shuttle stages 104S1, 104S2may provide the end effector 101 with a range of motion extending from agrid positioning unit 104 retract position 101R outside the TEM to aninspection or imaging location 177 inside the TEM for positioning thegrid carrier at the inspection or imaging location 177 so that the endeffector 101 defines at least a portion of the inspection or imagingstage of the TEM. In another aspect, the grid positioning unit 104 mayinclude a first shuttle stage (gross positioning stage) only; in otheraspects any suitable number of stages may be used. The movement of thefirst shuttle stage 104S1 may provide the end effector 101 with a rangeof motion extending from a grid positioning unit 104 retract position101R outside the TEM to an inspection or imaging location 177 inside theTEM for positioning the grid carrier at the inspection or imaginglocation 177 so that the end effector 101 defines at least a portion ofthe inspection or imaging stage of the TEM.

The first shuttle stage 104S1 and the second shuttle stage 104S2 mayinclude X axis drive or motors A1L and A2L respectively. It is notedthat the drives A1L and A2L (as well as the other drives describedherein) may respectively include any suitable encoders 248 and 249 whichmay be, for example, optical encoders, laser interferometric encoders,capacitive or inductive encoders or any other suitable encoder orcombinations thereof. In one aspect the encoders described herein mayhave a picometer position resolution while in other aspects the encodersmay have any suitable position resolution that may be consistent withthe positioning resolution of a respective drive motor of the axis alongwhich the encoder is providing position data. In still other aspects theencoders described herein may have a positioning resolution that islarger or smaller than the position resolution of the respective drivemotor. In other aspects the drives described herein may employ anysuitable integral position sensing capabilities of the drives. It isnoted that any suitable portions of the drives A1L and A2L may be sealedfrom an atmosphere of the transport module 125 and the loading module140 for isolating components, such as motors, to allow operation of thestages in a vacuum environment. In one aspect, the sealing or isolationmay be accomplished by using vacuum bellows 160 and 161 for the firstshuttle stage 104S1 and the second shuttle stage 104S2 respectively. Inother aspects drives A1L and A2L may be configured to operate in avacuum environment in any suitable manner while in still other aspectsthe drives may be configured to operate in an atmospheric environment.The X axis drives AIL and A2L may include any suitable motor and alinear stage having any suitable mechanical and/or solid stateelectromagnetic (and/or permanent magnet) guides 290 and 291 fortranslating the end effector 101 along the X axis. In one aspect themotor may be an ultrasonic piezo motor with less than about 1 umpositioning resolution while in other aspects the motor may be anysuitable motor having any suitable positioning resolution such as astepper motor, brushless motor, brushed motor, etc. The drives A1L andA2L may be configured to move the end effector towards and away from thegrid carrier magazine 102/230 for picking and placing grid carriers fromand to the grid carrier magazine 102/230 and transporting the gridcarriers along the X axis any suitable desired distance. The drive A1Land A2L may also be configured to move the end effector 101 through thetransport interface 125I and into the TEM for inspection or imaging ofthe grid held in the grid carrier by the end effector 101.

The Y, Z and theta (roll) axes motion may be monitored and controlled bythe conventional mulita-axis positioning stage 150 in the TEM. In oneaspect the conventional multi-axis positioning stage may include anynumber of additional axes of motion. The grid handling system 100, usingthe first shuttle stage 104S1 and the second stage 104S2 may providemotion (gross positioning 104S1) and (fine positioning 104S2) along theX axis only. All other axis of stage motion may be monitored andcontrolled by the conventional multi-axis positioning stage 150 in theTEM. In one aspect, the grid positioning unit 104 may only include afirst shuttle stage 104S1, and the conventional multi-axis positioningstage 150 in the TEM may monitor and control the X, Y, Z and theta(roll) axes of the end effector 101 during imaging or inspection. Inanother aspect, the grid positioning unit 104 may include a firstshuttle sage 104S1 and the second stage 104S2 may be fixed (nomonitoring or position control), and the conventional multi-axispositioning stage 150 in the TEM may monitor and control the X, Y, Z andtheta (roll) axes of the end effector 101 during imaging or inspection.

Referring to FIGS. 4A-4E, in one aspect, the end effector 101 may becoupled to the drive A3L in any suitable manner such as by a connectingor driven member 260 supported within the housing 104H in any suitablemanner. In another aspect, the connecting or driven member 260 may besupported outside of the housing 104H in any suitable manner. In oneaspect the connecting or driven member 260 may be connected to a gripper101G having a gripper flexure 101GF and a gripper grid support surface101GS. In one aspect the gripper grid support surface 101GS may includeone or more alignment features 211 disposed adjacent the gripper gridsupport surface 101GS. The alignment features 211 may have any suitableshape for interfacing with, for example a side edge of the grid carrier200 and to position the grid carrier (e.g. through substantial contactbetween the side edge of the grid carrier and the alignment features211) relative to the grid support surface 101GS. In another aspect, thealignment features 211 may interface with the top section 201 or thebottom section 202 of the grid carrier 200 or any other suitablegripping surface of the grid carrier 200. In still another aspect,alignment features 211 may interface with only the bottom section 202 ofthe grid carrier 200 or any other suitable gripping surface of the gridcarrier 200.

The drive A3L and the drive A1L may be configured for operation alongthe X axis to actuate the gripper 101G of the end effector 101 as willbe described below. Movement of the drives A3L and A1L may causerelative movement between the end effector 101 and the housing 104H ofthe first shuttle stage 104S1 (e.g. while maintaining the end effector101 at a predetermined position) so that the gripper flexure 101Gf andthe gripper support surface 101GS opens and/or closes. In one aspect thegripper 101G opens enabling the gripper flexure 101GF and the grippersupport surface 101GS to move in position adjacent to the gripping areas204L and 204R and in another aspect where the gripper 101G closesenabling the gripper flexure 101GF and the gripper support surface 101GSto constrain the grid carrier 200 at the gripping areas 204L and 204Rfor transport and positioning of the grid carrier 200. In anotheraspect, the gripper 101G may be opened and closed by any suitabledriving mechanism configured to constrain the grid carrier 200 at anysuitable location during transport and positioning.

A grid carrier detecting sensor 280 may be mechanically mounted to theend effector 101 adjacent to the grid gripper 101G for detecting thegrid carrier 200 before, after and/or during grid handling. In oneaspect the grid detecting sensor 280 may include any suitable sensorcapable of detecting the presence or absence of a grid carrier. In otheraspects, end effector 101 may have no sensor 280. In still otheraspects, the position of 101GF relative to 101GS may be capable ofdetermining the presence or absence of a grid carrier 200. In otheraspects, the grid detection sensor may be located at any suitablelocation within the grid handling system 100.

Referring now to FIGS. 1A-1E and 5 an exemplary operation of theautomatic grid handling system 100 will be described in accordance withan aspect of the disclosed embodiment. The transport module 125 and theloading module 140 may be pumped by using the TEM vacuum system (or inanother aspect, using the vacuum module 172) to a pressure substantiallyequal to a pressure of the TEM column 275. A grid carrier magazine102/230 holding one or more grid carriers 200 may be inserted into thegrid carrier magazine load lock chamber 120 (FIG. 5 , Block 500). Forexample, the door 120D may be opened, the grid carrier magazine 102/230may be kinematically placed on the grid carrier magazine shuttle 126Sand the door 120D may be closed to seal or otherwise isolate the gridcarrier magazine load lock chamber 120. The grid carrier magazine loadlock chamber 120 may be pumped to a pressure compatible with orsubstantially equal to the pressure within the transport module 125,loading module 140 and the TEM column 275. The grid carrier magazineshuttle 126S may move in the direction of arrow 701 opening port 120Pand moving the grid carrier magazine 102/230 such that a predeterminedgrid carrier is located at a pre-pick location and is within a range ofmotion of the grid positioning unit 104 (FIG. 5 , Block 510). The gridpositioning unit 104 may move in the X direction for positioning the endeffector to a pick location 101PP (FIG. 5 , Block 520), the grid carriermagazine shuttle may move in the direction of arrow 701 to a picklocation 126PP, the end effector gripper 400 may constrain the gridcarrier, and pick a grid carrier (holding a grid) from the grid carriermagazine 102/230 (FIG. 5 , Block 530). The grid positioning unit 104 mayretract to a retract position 101R and the grid carrier magazine shuttle126S may move further in the direction of arrow 701 to move the gridcarrier magazine to a retracted position 126R (FIG. 5 , Block 540). Thegrid positioning unit 104 may move in the X direction for positioningthe grid carrier (holding a grid) through the transport interface 125Iand into the TEM column 275, and in combination with the conventionalmulti-axis positioning stage 150, for inspection or imaging while beingheld by the end effector 101 (FIG. 5 , Block 550). The grid positioningunit 104 may retract from the TEM to the retract position 101R. The gridcarrier magazine shuttle 126S may move in the direction of arrow 700 tothe pre-place location, the grid positioning unit 104 may move to theplace location 101PP, the grid carrier magazine shuttle 126S may move inthe direction of arrow 701 to the place location 126PP, the gripper mayrelease the grid holder placing the grid holder onto the grid carriermagazine 102/230, and the grid positioning unit 104 may retract toretract location 101R, the grid positioning unit 104 may return the gridcarrier 200 to the position in the grid carrier magazine 102/230 fromwhich the grid was taken (FIG. 5 , Block 560). As may be realized, inone aspect additional grid carriers (holding a grid) held by the gridcarrier magazine 102/230 may be exchanged before the grid carriermagazine 102/230 is returned to the load lock 120 for removal (FIG. 5 ,Block 570).

In accordance with one or more aspects of the disclosed embodiment anautomated grid handling apparatus for an electron microscope isprovided. The automated grid handling apparatus includes a frameconfigured to removably couple to a multi-axis positioning stage port ofthe electron microscope, a transport module connected to the frame, thetransport module including a multistage shuttle, the multistage shuttlehaving a first shuttle stage having a single degree of freedom ofmotion, a second shuttle stage having a single degree of freedom ofmotion independent of the first stage and an end effector connected toat least one of the first and second shuttle stages, the end effectorbeing configured to hold a grid carrier and transport the grid carrierholding the grid into and out of the electron microscope through atransport interface and the multi-axis positing stage port, the endeffector having a range of motion, defined by a combination of the firstand second stage degrees of freedom of motions and a multi-axispositioning stage internal to the electron microscope, extending from agrid holding location outside the electron microscope to an inspectionlocation inside the electron microscope for positioning the grid carrierholding the grid at the inspection location so that the end effectorpartially defines an inspection stage of the electron microscope; and anautomated loading module connected to the frame and being communicablyconnected to the transport module, the automated loading moduleincluding a load port module through which grids are loaded into theautomated loading and transport modules.

In accordance with one or more aspects of the disclosed embodiment thesingle degree of freedom of movement of each of the first and secondshuttle stage share a common direction.

In accordance with one or more aspects of the disclosed embodiment thesingle degree of freedom of movement of the first shuttle stage and thesingle degree of freedom of movement of the second shuttle stage areconfigured for a gross movement and a fine movement along the commondirection.

In accordance with one or more aspects of the disclosed embodiment theautomated grid handling apparatus includes a carrier magazine shuttleseparate and distinct from the multistage shuttle, the carrier magazineshuttle being configured to transport grid carriers holding gridsbetween a loading module of the automated grid handling apparatus andthe multistage shuttle.

In accordance with one or more aspects of the disclosed embodiment thecarrier magazine shuttle is configured to transport a grid carriermagazine configured to hold one or more grid carriers, where the gridcarriers are configured to hold a grid.

In accordance with one or more aspects of the disclosed embodiment themultistage shuttle is configured for operation in a vacuum environment.

In accordance with one or more aspects of the disclosed embodimentportions of the multistage shuttle is configured for operation in anatmospheric environment.

In accordance with one or more aspects of the disclosed embodiment amotion resolution of the multistage shuttle is 0.5 micron.

In accordance with one or more aspects of the disclosed embodiment theend effector includes an integral sensor configured for determining thepresence or absence of the grid.

In accordance with one or more aspects of the disclosed embodiment thegrid comprises a specimen grid.

In accordance with one or more aspects of the disclosed embodiment thegrid carrier is configured to support a plurality of grid types.

In accordance with one or more aspects of the disclosed embodiment thegrid carrier is configured to support a plurality of grid types.

In accordance with one or more aspects of the disclosed embodiment thegrid carrier is configured to align and constrain the grid in apredetermined orientation.

In accordance with one or more aspects of the disclosed embodiment thegrid carrier magazine is configured to align and constrain the gridcarrier on a grid carrier magazine shelf.

In accordance with one or more aspects of the disclosed embodiment theframe, the transport module and the loading module is configured to movein the Y, Z and theta axis direction when the transport module is drivenby the multi-axis positioning stage.

In accordance with one or more aspects of the disclosed embodiment theframe, the transport module and the automated loading module isconfigured to move in X, Y, Z and theta axis direction when thetransport module is driven by the multi-axis positioning stage.

In accordance with one or more aspects of the disclosed embodiment theend effector is configured to hold the grid directly and transport thegrid into and out of the electron microscope through a transportinterface.

In accordance with one or more aspects of the disclosed embodiment thegrid carrier magazine is configured to hold one or more grids directly.

In accordance with one or more aspects of the disclosed embodiment anautomated grid handling apparatus for an electron microscope isprovided. The automated grid handling apparatus includes a frameconfigured to removably couple to a multi-axis positioning stage port ofthe electron microscope, a transport module connected to the frame, thetransport module being configured to transfer grid carriers holdinggrids in combination with a multi-axis positioning stage internal to theelectron microscope, the transport module having a rotary bearing andseal and being configured to move in a theta axis direction when drivenby the multi-axis positioning stage, an end effector connected to thetransport module, the end effector being configured to hold the gridcarrier and transport the grid carrier into and out of the electronmicroscope through a transport interface communicably connected to themulti-axis positioning stage port, where the end effector partiallydefines an inspection or imaging stage of the electron microscope and anautomated loading module connected to the frame and being communicablyconnected to the transport module, the automated loading moduleincluding a load port module through which grids are loaded into theautomated loading and transport modules.

In accordance with one or more aspects of the disclosed embodiment atheta axis direction range is +/−75 degrees.

In accordance with one or more aspects of the disclosed embodiment theframe is fastened using a fastener to the electron microscope, whereinthe frame and automated loading module being configured not to move inthe theta axis direction when the transport module is driven by themulti-axis positioning stage.

In accordance with one or more aspects of the disclosed embodiment thefastener is configured to prevent movement of the frame and theautomated loading module in the theta axis direction and allow movementof the frame, transport module and automated loading module in the X, Y,and Z axis direction when the transport module is driven by themulti-axis positioning stage.

In accordance with one or more aspects of the disclosed embodiment thetransport module includes a multistage shuttle, the multistage shuttlehaving a first shuttle stage having a single degree of freedom ofmotion, a second shuttle stage having a single degree of freedom ofmotion independent of the first stage where the single degree of freedomof movement of the first shuttle stage and the single degree of freedomof movement of the second shuttle stage are configured for a grossmovement and a fine movement respectively along a common direction.

It should be understood that the foregoing description is onlyillustrative of the aspects of the disclosed embodiment. Variousalternatives and modifications can be devised by those skilled in theart without departing from the aspects of the disclosed embodiment.Accordingly, the aspects of the disclosed embodiment are intended toembrace all such alternatives, modifications and variances that fallwithin the scope of the appended claims. Further, the mere fact thatdifferent features are recited in mutually different dependent orindependent claims does not indicate that a combination of thesefeatures cannot be advantageously used, such a combination remainingwithin the scope of the aspects of the invention.

What is claimed is:
 1. A specimen holder apparatus for an imagingsystem, the specimen holder apparatus comprising: an end effector withan alignment feature for releasably receiving a grid carrier with aspecimen thereon; at least one flexure that is connectable to the endeffector for fixing the grid carrier in the alignment feature of the endeffector, wherein the flexure is movably connected to the end effector,wherein the flexure is movable between a clamped and an unclampedposition, wherein in the unclamped position the grid carrier can beplaced adjacent to the alignment feature of the end effector, andwherein in the clamped position the grid carrier can be secured in thealignment feature of the end effector.
 2. The specimen holder apparatusof claim 1, wherein the imaging system comprising an electronmicroscope.
 3. The specimen holder apparatus of claim 1, wherein the endeffector is configured for operation in a vacuum environment.
 4. Thespecimen holder apparatus of claim 1, further comprising a sensorconfigured for determining the presence or absence of the specimen.
 5. Aspecimen carrier apparatus for holding a specimen, the specimen carrierapparatus comprising: a bottom section having a pocket configured tosupport a grid with the specimen thereon; and at least one hold downfinger configured to constrain the grid with the specimen thereon intothe pocket, wherein the at least one hold down finger and the pocket areconfigured to align and constrain the grid in a predeterminedorientation.
 6. The specimen carrier apparatus of claim 5, furthercomprising a top section, wherein the top section and the bottom sectionare connected through a connection mechanism.
 7. The specimen carrierapparatus of claim 6, wherein the connection mechanism comprising ahinge.
 8. The specimen carrier apparatus of claim 5, wherein the gridcarrier being configured to support a plurality of grid types.
 9. Thespecimen carrier apparatus of claim 6, further comprising a lockingdevice, wherein the locking device locks the top section to the bottomsection when the grid carrier is closed and unlocks the top section fromthe bottom section when the grid carrier is open.
 10. The specimencarrier apparatus of claim 5, wherein the at least one hold down fingerextends from the bottom section.
 11. The specimen carrier apparatus ofclaim 6, wherein the at least one hold down finger extends from the topsection.
 12. A specimen storage system for an automated specimenhandling apparatus, the specimen storage system comprising: a gridcarrier being configured to support a grid with a specimen thereon; anda grid carrier magazine being configured to support the grid carrier onat least one grid carrier magazine shelf, wherein the grid carriermagazine being configured to store grid carriers inside or outside ofthe automated specimen handling apparatus for a period of time.
 13. Thespecimen storage system of claim 12, wherein the grid carrier beingconfigured to support a plurality of grid types.
 14. The specimenstorage system of claim 12, wherein the grid carrier magazine beingconfigured to align and constrain the grid carrier on a grid carriermagazine shelf.
 15. The specimen storage system of claim 12, wherein thegrid carrier magazine being configured to store a batch size of gridcarriers that is greater than
 1. 16. The specimen storage system ofclaim 12, wherein the grid carrier magazine being configured to enablethe automated specimen handling apparatus to pick grid carriers from thegrid carrier magazine and to place grid carriers to the grid carriermagazine.
 17. The specimen storage system of claim 12, wherein the gridcarrier magazine further comprises kinematic features, wherein thekinematic features being configured to enable handling of the specimenstorage system inside or outside of the automated specimen handlingapparatus.
 18. The specimen storage system of claim 12, wherein the gridcarriers and the grid carrier magazine being configured for operation invacuum and non-vacuum environments.
 19. The specimen storage system ofclaim 12, wherein the period of time comprising an extended period oftime.
 20. The specimen holder apparatus of claim 1, further comprising adriven member that is configured for urging the flexure towards theclamped and unclamped positions.